Abstract
High-quality Mg x Zn 1− x O thin films were successfully grown on c-plane sapphire substrates by metal-organic chemical vapor deposition. The c-axis oriented Mg x Zn 1− x O films were deposited on sapphire at the temperature of 600–630°C. The structural and optical properties of Mg x Zn 1− x O films were investigated using X-ray diffraction (XRD) and the transmittance spectrum. MgO phase separation was not observed with Mg content up to x=0.39. The optical band gaps of Mg x Zn 1− x O alloys (0⩽ x⩽0.39) range from 3.3 to 3.95 eV.
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