Abstract
ABSTRACTTwenty to eighty nanometre thick zirconia (ZrO2) films were formed by anodisation of zirconium metal in 10% oxalic acid in the potential range of 10–30 V. Grazing-incidence X-ray diffraction measurement revealed the formation of orthorhombic ZrO2. X-ray photo electron spectroscopy confirmed the formation of nearly stoichiometric ZrO2 at 20 V. Ellipsometric measurement across the visible spectral band derived the value of refractive index of ZrO2 films in the range of 2.02–2.2.
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