Abstract
Tungsten oxycarbide films were synthesized on SUS 304 stainless steel at a temperature of 673K in a mixture of carbon dioxide, methane, argon and helium by an inductively coupled RF plasma-assisted magnetron sputtering method. The hardness of the films was determined to be more than 20GPa using a micro-Vickers hardness testing machine. The structure of the film was investigated in detail by X-ray diffraction. It is found that the films with a high micro-Vickers hardness, near stoichiometrical composition of W2CO, and a small lattice constant, have a strong X-ray peak intensity characterized by a highly oriented (110) plane and a large crystallite size.
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