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Abstract
Monolayer TiN and a-BCN and nanolayer TiN/BCN coatings are deposited by dual magnetron sputtering. The effect of discharge power, flow rates of gases, and substrate bias voltage on the mechanical properties of the deposited nanolayer coatings is studied. The structure, chemical bonding, mechanical properties, adhesion, and friction coefficient of the coatings are analyzed. It is established that the deposited nanolayer coatings have nc-TiNx/a-BNO+a-C structure. The Knoop hardness of the nanolayer TiN/BCN coatings is found to reach 45 GPa on average. The nanohardness is lower than the Knoop hardness (by 20–30%). The deposited nanolayer coatings can be recommended as wear-resistant and protective coatings for mechanical engineering.
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