Abstract
Multicomponent TiVTaNbZrHf alloy and (TiVTaNbZrHf)N coatings were deposited on Ti6Al4V alloy by High Target Utilization Sputtering. Sputtering was carried out by reactive sputtering from a TiVTaNbZrHf target with a different nitrogen addition. The microstructures, mechanical properties, and cytotoxicity tests were studied. It was found that the (TiVTaNbZrHf)N coatings showed a dense columnar structure with a face-centered-cubic solid solution phase. The (ZrTaNbVHfTi)N with 4 sccm nitrogen addition exhibited the highest hardness of 34 ± 0.33 GPa and high Indentation modulus of 408.47 ± 24.97 GPa. The mechanical properties greatly depended on the amount of added nitrogen in reactive plasma Physical vapor deposition sputtering. Cytotoxicity tests proved that a very high percentage of live cells were observed after 7 days of incubation time on (TiVTaNbZrHf)N coating.
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