Abstract
Crack-free, dense, polycrystalline BaTiO3 thin films have been synthesized on the Ti-deposited Si(100) substrates with various alkaline solutions of barium salts in the temperature range from 150° C to 280° C by hydrothermal method. The fabricated BaTiO3 thin films were found to have good adhesion on the substrate. The structural properties of thin films were investigated by X-ray diffraction (XRD) measurements. It was discussed about the crystallinity, surface morphology and interfaces of the resultant films depending on the reaction conditions such as time, temperature and solution. The thickness of the films increased with increasing temperature and time of reaction. The dielectric constants and the loss factor of thin film were measured in the frequency range from 100 Hz to 1 MHz at room temperature.
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