Abstract
The effects of different SiNx interlayers on the structural and electrical properties of nonpolar Si-doped a-plane (11–20) GaN films grown on r-plane (1–102) sapphire were investigated. The surface roughness depends strongly on the SiNx coverage, deposition temperature and number of SiNx layers. The in-plane anisotropy of on-axis x-ray rocking curves (XRCs) (full width at half-maximum) was significantly decreased by the introduction of multiple SiNx-treated GaN interlayers, indicating coherently scattering domains of uniform size. Off-axis XRC measurements were also employed to investigate the effects on the mosaic twist corresponding to edge dislocation and the I1-type basal-plane stacking fault (BSF) density. Hall effect measurement showed that the electrical conductivity was the highest when multiple SiNx/GaN interlayers were employed. The measured sheet resistances (Rsh) along the c-axis were higher than those along the m-axis. These anisotropic conductivities could be explained by BSFs acting as carrier scattering centers. The ratios of Rsh along the two in-plane orientations also correlated well with the BSF densities.
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