Abstract

PZT(70/30) powder was prepared by a sol-gel method and PZT thick films were fabricated by the screen-printing method on the alumina substrates. The coating and drying procedure was repeated 4 times. And then the PZT(30/70) precusor solution was spin-coated on the PZT thick films. A concentration of a coating solution was 0.5 mol/L and the number of coating was varied from 0 to 6. The porosity decreased and the grain size increased with increasing the number of coatings. The thickness of the PZT-6(6: number of coatings) films was about 60~65μm. All PZT thick films showed the typical XRD patterns of a typical perovskite polycrystalline structure. The relative dielectric constant of the PZT-6 thick film was 540. The remanent polarization and coercive field of the PZT-6 film were 23.6 μC /cm2, 12.0 kV/cm, respectively.

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