Abstract
BaTiO 3/SrTiO 3, SrZrO 3/SrTiO 3 and BaTiO 3/BaZrO 3 artificial superlattices were fabricated by the molecular beam epitaxy process. X-ray diffraction (XRD) reciprocal space mapping measurement was performed using high-resolution XRD. In all artificial superlattices, the superlattices with the 10-periodic structure showed the clear satellite peaks in the XRD pattern and were mostly distorted in the direction of film thickness. Superlattices with the 10-periodic structure showed a high dielectric permittivity of ε r = 33,000 or artificially induced ferroelectricity. It was clarified that the anisotropic lattice distortion introduced by the strains due to the lattice mismatch was the origin of the unique dielectric characteristics of artificial superlattices.
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