Abstract
BaTiO3/SrTiO3 artificial superlattices were fabricated by the molecular beam epitaxy process. The superlattice with the 10-periodic structure was mostly distorted in the film thickness direction, and showed the highest dielectric permittivity than other periodic superlattice. The temperature dependence of dielectric properties was measured in the range from room temperature to +150 degrees at 1 GHz. Compared with Ba x Sr1−x TiO3 solid solution ceramics or BaTiO3 ceramics, there was almost no temperature dependence of dielectric permittivity. As a result, it was cleared that induced lattice distortion played an important role to determine the dielectric properties of artificial superlattices.
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