Abstract
Epitaxial Pb(Sc 1/2 Nb 1/2 )O 3 (PSN) and PbTiO 3 (PT) superlattice thin films are processed on single-stepped SrTiO 3 (001) substrates by the pulsed laser deposition (PLD) technique. SrRuO 3 is deposited on the substrate as a bottom electrode layer for dielectric measurements. The orientation and structure of the films are determined by X-ray diffraction (XRD) method. Clear superlattice reflections are observed by XRD and the period of superlattice is calculated from difference of 2θ of superlattice reflection. Real part of dielectric constant is about 350 at room temperature in the frequency range of 10 2 -10 5 Hz.
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