Abstract

Er silicide nanostructures were produced by depositing Er on a clean Si(001) substrate. From the off-line observation by scanning electron microscopy, several kinds of nanostructures were observed; nanowires, nanobelts made by a lateral binding of nanowires, and three-dimensional (3D) islands. The 3D islands occupied a major part in those nanostructures, and had slight beltlike structures on their surfaces. The three-dimensional medium-energy ion scattering clearly indicated that the nanostructures were highly epitaxial, and that the nanostructures had a single kind of crystallographic structure of monoclinic $\mathrm{Er}{\mathrm{Si}}_{2}$, deformed from hexagonal.

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