Strip-loaded horizontal slot waveguide for routing microdisk laser emission

Abstract

A strip-loaded horizontal slot waveguide is used for routing the emission of a microdisk laser. The active region of the laser contains InAs/InGaAs/GaAs quantum dots operating in CW mode under optical pumping. Although the quantum dots emit in a broad range, the laser emission is single mode with λ = 1290 nm . Atomic layer deposition is used for the fabrication of the TiO 2 / SiO 2 / TiO 2 slot waveguide covering the 10-µm-diameter disk. The horizontal slot waveguide covers the microdisk and traps the emission in the fundamental TM mode of the three-stack layer. Once light is localized inside this planar waveguide, a loading strip creates an effective index difference, which is sufficient to confine the mode laterally and leads to the guiding of the lasing emission. An analytical model for the five-layer horizontal planar slot waveguide was developed in order to optimize the slot waveguide according to the operation wavelength of the microlaser and the different materials involved. Scanning near-field optical microscopy is used to observe the propagation of light within the waveguide and confirm the mode coupling into it and therefore the guiding along the loading strip.