Abstract
The finite-element method (FEM) is used to calculate stresses in a square silicon pressure-sensing element. The stresses near the edges of the membrane are calculated and measured. Close agreement is achieved between the FEM predictions and experimental results. An empirical formula is constructed for the longitudinal component of stress at points outside the membrane. It is established that the normal component of stress should be considered when designing pressure sensors for use at applied pressures above 107 Pa.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
