Stress and its Effect on Surface Morphology in Multi-Layer Ti-Cu Films

Abstract

AbstractWe have characterized the stress and its effects on surface morphology for multi-layer thin films of about 3μm total thickness, consisting of three or seven layers of Ti and Cu. These films constitute the electrostatic suspension electrodes for the gyroscope housings of the Relativity Mission Gravity Probe B. Full understanding of surface morphology is critical for meeting the complex requirements of this application.The residual stresses have been measured using a laser curvature technique, while the surface morphology was studied by scanning electron microscopy (SEM). We find that the surface morphology depends strongly on the stress, which evolves with the Ti-Cu multi-layer period. Average stress and the resulting surface roughness decrease for thinner Cu layers (increased total number of layers). Seven layer Ti-Cu films with low stress and very smooth surface have been successfully used for the electrodes of the gyroscope housings.