Stopping power of 11B in Si and TiO2 measured with a bulk sample method and Bayesian inference data analysis

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Abstract The popular stopping power interpolative schemes require experimental data to be developed. Where the data bases are sparse, with few experiments available, interpolations can be more inaccurate. This is the case for the stopping of heavy ions, where even for important targets such as Si there is a need for more measurements. For compounds, the situation is even worse with very few measurements available. In particular, the stopping in oxides and nitrides often deviates significantly from what would be expected using the Bragg’s rule. We apply a method that uses bulk or thick film samples to determine the stopping power of 11B in Si and TiO2. The method, which relies on Bayesian inference analysis of RBS spectra obtained at different energies, has been previously validated by verifying the results obtained in the well-known system 4He in Si.