Abstract
The stopping cross section for 4He projectiles of Ti thin films have been measured with the backscattering method using a multi-compound marker layer deposited between the test film and the substrate. Problems derived from the non-uniformity of the marker layer as well as corrugations of the films under test have been solved with the help of a computer code to synthesize Rutherford Backscattering Spectrometry (RBS) spectra. Stopping cross section values are obtained with an estimated uncertainty of 4%.
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