Abstract
An experimental method is established for stoichiometric analysis and profiling of the surface region of solids by adapting a TOF-E counter telescope to acquire spectra of the atomic mass and the kinetic energy of recoils. A 10 MeV 35Cl beam, delivered by a small tandem, bombards samples to eject the recoils. The samples include Ta2O5 films deposited onto Si substrates. Advantages and the limit of applicability of the present method are discussed.
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