Solid-source doping by using phosphosilicate glass into p-type bulk Si (100) substrate: Role of the capping SiO2 barrier

Abstract

Systematic experimental studies on phosphorus diffusion from phosphosilicate glass into the p-type bulk Si (100) substrate with different capping barrier layer thicknesses have been conducted. In both 2- and 5-nm phosphosilicate glass conditions, a thicker SiO2 cap showed a lower sheet resistance and a higher retained phosphorus dose in the Si substrate after 1050 °C 4 s rapid thermal annealing as drive-in annealing. However, the sheet resistance of 2-nm phosphosilicate glass with a 10-nm SiO2 cap was lower than that of 5-nm phosphosilicate glass with a 3-nm SiO2 cap due to a higher retained phosphorus dose in the Si substrate. For a higher retained phosphorus dose in the Si substrate using fixed total thickness, 2-nm phosphosilicate glass with 6-nm SiO2 cap is better than 5-nm phosphosilicate glass with 3-nm SiO2 cap since prevention of phosphorus out-diffusion during the drive-in annealing is more important than the total phosphorus dose in phosphosilicate glass. Next, SiO2 cap thickness on 2-nm phosphosilicate glass was split to understand the role of the SiO2 capping layer in detail for scaled devices. 3-nm SiO2 cap could not prevent out-diffusion during the drive-in annealing, and it showed much higher sheet resistance and lower retained phosphorus dose in the Si substrate. The highest retained phosphorus dose in the Si substrate was observed for 6-nm SiO2 cap and resulted in 1.8 × 1014 atoms/cm2 retained phosphorus dose with 96% activation level after 1050 °C 4 s rapid thermal annealing. Thicker SiO2 caps than 6 nm were not beneficial since 10-nm SiO2 cap showed a higher sheet resistance value as well as lower phosphorus activation level (82%) compared to 6-nm SiO2 cap even though both the process conditions showed same phosphorus profiles after the drive-in annealing. That sheet resistance increase with 10-nm SiO2 cap could be caused by heterogeneous surface formation on the Si substrate with a prolonged SiO2 atomic layer deposition process.