Abstract
In the present work the parameters characterizing sorption processes on irradiated surfaces are discussed. The hypothesis of a stimulating effect due to radiation defects on the sorption processes is confirmed by measuring the sticking coefficient. The sorption of nitrogen on titanium films (at 300 K) under helium, argon, neon, krypton and N 2 ion bombardment is investigated. The bombardment of the surfaces with ions with energies up to 1.5 keV results in a significant increase in the sticking coefficient. The dependences of the sticking coefficient and the sorption ratio on the parameters of the radiation are shown and a good correlation between the increase in the sorption ratio and the rate of generation of radiation defects is found.
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