Abstract
The getter pump design needs reliable values of the sticking coefficient of the pumped gas as well as their change during the getter film saturation. The paper deals with averaging of known experimental data for sticking coefficients of common gases on titanium films, taking into account their roughness. The kinetics of N 2 and H 2 sticking coefficients at different pressures is also given, which makes possible the design of getter pump devices with periodic active film renovation.
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