Abstract

Interest to the formation of QDs in wide bandgap InGaAlN system is due to several reasons. First, all layers in an InGaAlN-based heterostructures are lattice mismatched that leads to strong phase separation and QD formation even in low content thin InGaN layers. Second, QDs in the wide bandgap material have large localization energy that leads to effective localization of carriers, suppression of carrier transport toward defect areas, density of which typically is about 5-10×108 cm-3, and resulting in effective emission efficiency. Third, InGaN QDs allow expanding of emission range of InGaN-based light emitting devices. For InGaN-based light emitting diodes (LEDs) even red emission was demonstrated (Mukai et al., 1999). However, spontaneous formation of the InGaN QDs requires development of the special methods to control their structural and optical properties. In this sense detail investigations of the correlation between parameters of growth of the QDs and their properties (density, sizes, content) are important. Different approaches were studied to form InGaN QDs. Stranskii-Krastanov mechanism of InGaN QD formation was investigated in (Bai et al., 2009; Choi et al., 2007). However, specific growth conditions are required to form such QDs that can leads to worsening of structural quality of the InGaN layers and low efficiency of emission. More attention was paid to investigations of the phase separation in thin InGaN QWs at changing of the equilibrium of the epitaxial growth conditions. It was show that different growth parameters affect the properties of the InGaN QDs: annealing of the InGaN QWs after deposition (Oliver et al., 2003); growth conditions of GaN layer covering the InGaN QW (Wang et al., 2008; Wen et al., 2001); growth interruptions (GIs) after deposition of the InGaN QWs (Choi et al., 2007; Ji et al., 2004); changing of In flow or growth temperature during InGaN deposition (Kumar et al., 2008; Musikhin et al., 2002; Shim et al., 2002 ; Soh et al., 2008 ; Sun et al., 2004). Thus, formation of the InGaN QDs are depending on large number of parameters. For complex multilayer structure changing of structure design and growth conditions of under layers (below active region) can leads to changing of the active region properties. Moreover, this is correct for the effect of upper layers (above active region). This can be critical, for example, in the case of growth of monolithic white LEDs containing several InGaN QWs emitting at different wavelengths in wide region of spectrum. Besides, effect of QDs on width of emission line can improve color parameters of RGB, in particular monolithic, white LEDs.

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