Abstract
Modern microscopes and profilometers such as the coherence scanning interferometer (CSI) approach sub-nm precision in height measurements. Transfer standards at all measured size scales are needed to guarantee traceability at any scale and utilize the full potential of these instruments, but transfer standards with similar characteristics upon reflection to those of the measured samples are preferred. This is currently not the case for samples featuring dimensions of less than 10 nm and for biosamples with different optical charasteristics to silicon, silica or metals. To address the need for 3D images of biosamples with traceable dimensions, we introduce a transfer standard with dimensions guaranteed by natural self-assembly and a material that is optically similar to that in typical biosamples. We test the functionality of these transfer standards by first calibrating them using an atomic force microscope (AFM) and then using them to calibrate a CSI. We investigate whether a good enough calibration accuracy can be reached to enable a useful calibration of the CSI system. The result is that the calibration uncertainty is only marginally increased due to the sample.
Highlights
Modern microscopes and profilometers, such as the coherence scanning interferometer (CSI) which is often called the scanning white light interferometer (SWLI), approach sub-nm precision in height measurements
We test the functionality of these transfer standards by first calibrating them using an atomic force microscope (AFM) and using them to calibrate a CSI
We investigate whether a good enough calibration accuracy can be reached to enable a useful calibration of the CSI system
Summary
Modern microscopes and profilometers, such as the coherence scanning interferometer (CSI) which is often called the scanning white light interferometer (SWLI), approach sub-nm precision in height measurements. For the CSI, accurate calibration of the vertical scale can be difficult, as this scale typically depends on the accuracy of the height encoder and the properties of translation. The interferometric Z-scale [4,5,6] such as is used in a metrological AFM (MAFM) [7], is one solution, but it is costly, adds complexity and patent issues can prevent its use
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