Performance test of cantilever transfer standard used for afm tip calibration based on electromagnetic compensation

J Jiang,Y Zhang,S Wu,Z Zhang,G Hu,H Zhou

doi:10.21014/acta_imeko.v9i5.954

J Jiang, Y Zhang + Show 4 more

Open Access

https://doi.org/10.21014/acta_imeko.v9i5.954

Copy DOI

Journal: Acta IMEKO	Publication Date: Dec 31, 2020
Citations: 1	License type: cc-by

Affiliation: National Institute of Metrology, Tianjin University

Abstract

This paper describes stiffness measurement of cantilever transfer standards used for Atomic Force Microscopy (AFM) tip calibration based on electromagnetic compensation. The transfer standard of cantilever is designed and manufactured based on the bulk fabrication of SOI wafers. The measure range of the transfer standard covers from 0.04 N/m to 16 N/m. The series of transfer standard is designed for the calibration test of the cantilever used in AFM, along with the test apparatus specifically designed. The relative uncertainty of the stiffness is smaller than 2.4 % (<em>k</em> = 2).

Highlights

Atomic Force Microscopy (AFM) can be utilised to observe the matters under very small dimension with high sense of the force below 10-6 N [1,2]
This paper describes stiffness measurement of cantilever transfer standards used for Atomic Force Microscopy (AFM) tip calibration based on electromagnetic compensation
The relative uncertainty of the stiffness is smaller than 2.4 % (k = 2)

Summary

Introduction

Atomic Force Microscopy (AFM) can be utilised to observe the matters under very small dimension with high sense of the force below 10-6 N [1,2]. Abstract: This paper describes stiffness measurement of cantilever transfer standards used for Atomic Force Microscopy (AFM) tip calibration based on electromagnetic compensation. The transfer standard of cantilever is designed and manufactured based on the bulk fabrication of SOI wafers.

Results

Conclusion