Steering operation of optical beam scanner with semiconductor waveguides

Abstract

An optical beam scanner which is capable of high speed random steering has been fabricated. The device consists of two AlGaAs/AlGaAs rib waveguides prepared on a GaAs substrate. The deflection angle obtained was 3.2° by applying a reverse bias of 9 V to the pn junction in one of the waveguides. This angle almost agrees with the value designed.