Abstract
As chip densities increase the number of process parameters which require attention increases dramatically making the job of the process engineer exceedingly difficult. This paper will discuss the use of Statistical Process Control and Taguchi-type statistically designed experiments to develop decision rules for use in statistical expert systems. Statistical experiments, using Taguchi's method, have been carried out in the area of photolithography. This results in a basis for decision rules indicating the importance and effect of a given sub-process in photolithography. Using the results of Taguchi experiments and expert process knowledge, an inference can be drawn to lead the expert system to a diagnostic conclusion. The statistical expert system incorporates, diagnosis, design, planning and scheduling.
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