Abstract
A concept of a multilink test scheme with a two-step probability plot and its statistical accuracy of estimation are investigated for the time-dependent dielectric breakdown under defect clustering condition in the back end of line and middle of line. It is useful for obtaining an accurate estimation of lifetime that explains a complicated distribution shape due to impacts of clustered defects. Furthermore, applying a regression of the electric field dependence of breakdown to the lifetime distribution analysis will provide a more accurate estimation.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
