Abstract
The authors propose a profit-based framework for an integrated CAD-CAM system for VLSI design and manufacturing. The inefficiencies of present-day CAM systems are due to the lack of appropriate methodologies for process monitoring and statistical techniques to analyze the in-process and end-of-process data. Methodologies for monitoring lots in fabrication lines using in situ measurements and controlling lots using the multivariate distribution of observable in-process parameters were developed. The software system which implements the algorithms has shown encouraging results when applied to industrial fabrication lines.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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