Static power characteristics of selective buried oxide CMOS devices

Abstract

AbstractSelective buried oxide (SELBOX) Metal‐Oxide‐Semiconductor Field‐Effect Transistor (MOSFET) structure can be used to reduce the kink effect and self‐heating problems associated with the silicon on insulator (SOI) MOSFET devices while maintaining the advantages of bulk MOSFET. In this paper, static power dissipation of SELBOX structure is investigated and compared with SOI and bulk structures. Various MOSFET structures are simulated and evaluated in terms of their static power dissipation. Only results from 90‐nm Complementary Metal Oxide Semiconductor (CMOS) technology devices are included in this paper. Simulation results using the Silvaco TCAD show that static power dissipation in SELBOX CMOS is similar to that of SOI devices but lower than that of bulk CMOS. Hence, SELBOX structure is found to produce relatively low‐static power dissipation while maintaining high operating speed and reducing self‐heating and kink effect. A mathematical model to describe the static power dissipation in the subthreshold region is also included. Statistical analysis show that the model and fabrication simulation results agree with P < .05 and correlation coefficient of 0.95.