Abstract
The static modeling of a bi-axial torsional micro-mirror with sidewall electrodes is investigated. The mirror and sidewall electrodes experience different voltages. As a result of the potential difference, the mirror rotates about x and y axes with the torques generated from electrostatic forces by the sidewall and bottom electrodes. The rotations about two axes are made possible using a gimbal frame and serpentine springs. An analytical model is presented that is a simplified model of a previous study based on independent excitation of the two rotation angles. The simplified model enables prediction of the rotation angles with good accuracy and faster computation time.
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