Abstract

A study of the characteristics of a micromirror with sidewall electrodes is presented. The static and dynamic performance of a micromirror with the addition of sidewall electrodes is improved over that of a micromirror with only bottom electrodes. The linear voltage-to-angle property is still maintained under differential drive method and the drive voltage to achieve the same angular displacement is greatly reduced. The pull-in voltage is not changed significantly. In addition, our model demonstrates that undesired spring-softening effect that is commonly found in electrostatic actuation is significantly reduced. Analyses are based on both analytical model and FEM simulation.

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