Abstract
Standards for the measurement procedures of nitrogen concentration in CZ silicon crystals were established for infrared absorption spectroscopy (IR), secondary ion mass spectroscopy (SIMS) and charged particle activation analysis (CPAA) for concentration above 1x1014 atoms/cm3.Good agreement was obtained between the laboratory within the same method and between the three methods. Conversion coefficient from (weighted sum of) absorption coefficients to nitrogen concentration agreed well with the previous one.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
