Abstract
This paper presents structure design, microfabrication processes, calibration techniques and experimental results of differential capacitance force sensors with features of sub-nano-newton sensitivity, up to 10 000 Hz sampling rate, and applicability as stand-alone devices. The representative sensor demonstrates a force resolution of 0.11 nN at a 19 Hz sampling rate or 1.47 nN at 10 000 Hz. A novel asymmetric differential capacitance structure proposed results in remarkable increase in the ratio of measurement range to resolution in comparison with traditional symmetric structure. In addition, the stiction between silicon and glass caused by the capillary force during dicing is eliminated by the use of hydrophobization treatment. Such a treatment is essential to successfully fabricate structures with a large ratio of overlapped area to gap in silicon/glass anodic bonding processes.
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