Abstract
We have fabricated micro-disk and micro-stadium optical resonators based on conventional InGaAsP/InP multi-quantum well laser epitaxial structures, using a hybrid process by Focused Ion Beam milling and selective wet chemical etching. Resonators with very smooth walls were obtained allowing the observation of optical modes of the stadia with a 15 nm separation. This modal separation is an evidence of the beating between stadium scar modes.
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