Abstract
Micro-fabricated field emitter for the application in miniaturized scanning electron microscope (MSEM) was fabricated on silicon substrate. Field emission studies of the micro-fabricated field emitter were carried out in an ultra high vacuum system. A simple voltage controlled feedback circuit was designed and used to regulate the gate voltage in order to improve the emission current stability of the micro-fabricated field emitter. Preliminary results showed that the emission current fluctuation (( I max − I min)/ I ave) was reduced from 80% without feedback current stabilizer to less than 1% with the circuit control.
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