Abstract

Since the stability of functional properties of a transparent conducting three-layer structure ZnO:Ga/Ag/ZnO:Ga is important for practical application, we studied its long-term durability and thermal stability in air environment. It has been demonstrated that after prolonged interaction with the air environment at room temperature (for ~ 1000 days) and further heat treatment in air at temperatures of up to 450oC (for up to 10 h), the three-layer structure retains its integrity and is characterized by a low sheet resistance Rs=2.8 Ω/sq at average transmittance in the visible range Tav=82.1%. Keywords: transparent electrode, multilayer structure, ZnO, Ag, Ga, sheet resistance, transparence, stability, heat treatment.

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