Stability and surface properties of GeSi alloy films on Si(111) substrate

Abstract

Several GeSi alloy films with different surface properties were prepared from a 500 Å thick Ge film that had previously been grown on a Si(111)-7×7 substrate by molecular beam epitaxy. The films were prepared by combinations of sputtering, annealing and Ge deposition from an evaporator. The surface properties were studied by Auger electron spectroscopy (AES) and by low energy electron diffraction (LEED). A novel LEED system employing position-sensitive detection was used. The Ge film surface gave a superposition of 7×7 and c(2×8) LEED patterns. A 7×7 → 1×1 phase transition was observed at 425±10°C. An irreversible 7×7 → c(2×8) transition was observed when the sample was heated above 500°C. The Ge film melted at 750±30°C and formed a Ge x Si 1− x ( x = 0.85±0.05) alloy whose surface gave a 7×7 LEED pattern. A 7×7 → 1×1 phase transition was observed at 600±0.15°C. Prolonged sputtering and annealing resulted in a Ge x Si 1− x ( x = 0.53±0.05) alloy whose surface gave a 5×5 LEED pattern. An apparent 5×5 → 1×1 phase transition was observed at 870±10°C but at that temperature the film was converted irreversibly to one with a much lower Ge atom fraction ( x = 0.025±0.005) whose surface gave a 7×7 LEED pattern. A surface with a 5×5 pattern identical to that for the x = 0.53 alloy was prepared by deposition or Ge on Si. A similar 5×5 surface was prepared by deposition of Ge on a facetted GeSi alloy surface originally showing a superposition of 5×5 and 7×7 patterns. The intensity distributions in all of the 7×7 LEED pattern were found to be similar to those for Si(111)-7×7 at nearly the same electron energies. The characteristics of the 7×7 → 1×1 phase transitions were discussed in direct comparison with those of the Si(111)7×7 → 1×1 and Ge(111)-c(2×8) → 1×1 transitions observed with the same LEED system.