SS-DNA-decorated Single-Walled Carbon Nanotubes integrated on CMOS circuitry for high sensitivity gas sensing

Abstract

In this paper, we demonstrate the integration of single-stranded-DNA (ss-DNA) decorated Single-Walled Carbon Nanotubes (SWNT) onto Complementary Metal Oxide Semiconductor (CMOS) circuitry for gas sensing applications. Utilizing Dielectrophoresis (DEP) assembly, a simple and a low temperature process, we first demonstrate integration of SWNTs onto CMOS circuitry at the die level. SWNTs are sensitive to numerous odors, and functionalization of SWNTs with biomolecular complexes further enhances their sensing specificity and sensitivity. This was demonstrated when we attached ss-DNA around SWNTs and our results indicated twice the sensitivity of the sensors compared to the plain SWNTs. The remarkable set of attributes of the SWNTs coupled with the ss-DNA molecules provides an attractive platform for ultra sensitive electronic nose type of applications.