Abstract
We present integration of single-stranded DNA (ss-DNA)-decorated single-walled carbonnanotubes (SWNTs) onto complementary metal oxide semiconductor (CMOS) circuitry asnanoscale chemical sensors. SWNTs were assembled onto CMOS circuitry via a low voltagedielectrophoretic (DEP) process. Besides, bare SWNTs are reported to be sensitive tovarious chemicals, and functionalization of SWNTs with biomolecular complexes furtherenhances the sensing specificity and sensitivity. After decorating ss-DNA on SWNTs,we have found that the sensing response of the gas sensor was enhanced (up to ∼ 300% and ∼ 250% for methanol vapor and isopropanol alcohol vapor, respectively) compared with bareSWNTs. The SWNTs coupled with ss-DNA and their integration on CMOS circuitrydemonstrates a step towards realizing ultra-sensitive electronic nose applications.
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