Abstract
This scientific contribution presents a novel concept and design of a hydraulic inchworm feed drive based on an electrorheological suspension. This feed drive is ought to power Micro Machining Units (MMU) of Square Foot Manufacturing (SFM) modules. The transfer of energy is conducted by an electrorheological suspension, a field-responsive fluid that allows the use of small, rugged and simple micro valves. Both of the presented feed drive’s prototypes comprise electrorheological micro valves as primary actuators and flexible metal bellows as secondary actuators in two configurations. The combination of electrorheological micro valves with flexible metal bellows allows a very compact and sealed design that avoids dynamic seals and therefore leakages making the electrorheological inchworm feed drive suitable for a wide spectrum of motion solution including clean room applications.
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