Sputtering yield measurements on single crystal cobalt

Abstract

Single crystals of cobalt have been bombarded with 80 keV Ar + ions in the 〈0001〉 direction of the h.c.p. structure and in the 〈111〉 direction of the f.c.c. structure. The sputtering yields, measured by the weight loss method, depend on the crystal structure, and damage introduced by the ion bombardment is shown to play a significant role in the explanation of the measured sputtering yields.