Abstract
This paper describes the production of polycrystalline yttrium iron garnet films by r.f. sputtering from mixed oxide powders. A simple theory of compositional variation of sputtered alloy with time is derived, and from this the expected variation from sputtered powders deduced. This variation is compared with the results of experimental sputtering of a mixture of 3 Y2O3: 5 Fe2O3 to form Y3Fe5O12 (YIG) and YFeO3 (yttrium orthoferrite). Magnetic properties of the films are reported. Cet article decrit le depǒt de couches minces polycrystallines de Y3Fe5O12 (YIG) par la radio frequence pulverisation avec les poudres des oxydes melanges. Une theorie simple de la variation compositionnelle de titre pulverise est tire, et depuis cette theorie, la variation attendre de poudres pulverise est deduit. Cette variation est a cǒte avec les resultats de pulverisation experimental d'un melange de 3 Y2O3:5 Fe2O3 pour fabriquer Y3Fe5O12 et YFeO3 (type perovskite). Les particularites magnetiques sont reportees.
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