Abstract
High fluence ion implantation of solids is known both to lead to new phase evolution and to modify, by sputtering, the surface topography of the solid. In the past the two processes have been separated by the use of only intermediate, but variable species, fluences in the former (e.g. by mixing of two-layer systems) or high fluence, inert gas or self-iron irradiation in the latter type of study. In the present study a variety of very high fluence (greater than 10 19 ions cm −2) implants into polycrystalline and single-crystal copper substrates have been studied to elucidate both mixing (and possible phase formation) and topographic evolution effects. The species were chosen to exert similar ballistic or collisional processes but different chemical or metallurgical effects in the substrate.
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