Sputtering behavior of graphite and molybdenum at low bombarding energies

Abstract

Sputtering yields for the fusion-relevant materials pyrolytic graphite and molybdenum are reported for incident 0 + and noble gas ions in the energy range of 100 eV to 10 keV. The graphite targets were cut in two different crystallographic orientations and bombarded with noble gases to establish the mass dependence of the sputtering yield. Oxygen bombardment was done with graphite and Mo targets at room temperature and at 750°C to investigate chemical effects. Compared to sputtering with Ne, 0 sputtering results in increased yields for graphite targets and decreased yields for Mo targets.