Abstract
The dynamic Monte Carlo program including a bombardment-induced Gibbsian segregation process was used to calculate angular distributions of individual elements from sputtered Cu0.5Pt0.5 alloy in the Ar ion energy range between 0.2 and 1.5ke V. Calculated results show that for each investigated incident energy, the angular distribution of the Pt element is more forward-pointed than that of the Cu one; the reason may be that different percentage of sputtered atoms (37 similar 45% of Pt and 12 similar 19% of Cu) come from beneath the topmost layer.
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