Sputter ion pump element pumping speed measurement with the help of a Monte Carlo code

Abstract

As part of the design of the vacuum system of a new Synchrotron Light Source for Brazil – SIRIUS, the Vacuum Group from the Brazilian Synchrotron Light Laboratory (LNLS) proposed the pumping speed study of a sputter ion pump element assembled inside the vacuum chamber. This configuration aims to reduce components attached to the chamber enabling an easier alignment procedure and a conductance enhancement to pumped gases. The study was carried out by experimental measurements and numerical simulations using Monte Carlo method. The measurements and Monte Carlo calculations results presented a good agreement, with errors less than 10%. Further, inserting the element in the vacuum chamber enhanced maximum pumping speed when compared with the manufacturer’s data, due to the conductance’s increase for gases.