Abstract

Titanium and vanadium have been irradiated with inert as well as reactive ions while exposed to varying gas pressures of H 2, N 2 and O 2. The general effect of reactive gas atoms on Ti and V surfaces is a reduction of the sputtering yield, an enhancement of the ionized fraction of ejected particles, and a suppression of surface topographical effects; oxygen was found to be most effective in all respects. The angular emission distribution is only weakly affected and conforms closely to a cosine distribution, with a tendency to an “over-cosine” distribution at very low energies and light ions. p]Further evidence was found for promoted incorporation of gas atoms into the solid when the exposure to the gas phase is accompanied by energetic particle irradiation.

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