Abstract
Superhigh Δ (>1.5%) waveguides are receiving more attention to realize integrated functional circuits. However, one of the problems in the adoption of superhigh Δ waveguides is an increase in coupling loss between a waveguide and a conventional single mode fiber. To overcome this problem we have proposed the use of a spot size converter (SSC) that has a well-designed vertical taper fabricated by sputter etching. In this paper, we describe the fabrication process of this SSC, and particularly discuss the adjustment of an incline angle in sputter etching.
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