Abstract
In the paper, a basic approach to the acquisition and processing of diffraction spot intensities of low energy electron diffraction (LEED) images is described. Major attention is paid to the impact of background subtraction methods on structural parameters of solid surfaces. Comparing the application of several background subtraction methods in the testing series of artificial images and the series of real diffraction images of an Al(1 1 1) structure, the methods of averaging on the border, averaging on the quadrants, and approximation in rows/columns were found to be equivalent and gave realistic results. Due to its simplicity, the approximation in rows/columns is recommended for application in LEED.
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