Abstract
A method of analyzing the pumping performance of spiral grooved visco-vacuum pumps with arbitrary groove cross-sections is presented. Numerical calculations are performed on triangular and semicircular, as well as on rectangular, grooves. The flow in the groove region is connected with the flow in the ridge region by means of Boon and Tal's ‘Narrow groove theory’ in order to obtain the pumping performance. The zero-flow performances of the three groove shapes are almost the same if optimum helix angles are chosen. The results suggest that the radial clearance can be enlarged by factors of 20–100, compared with that of a conventional Holweck-type pump.
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